테스트 웨이퍼
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- 베어 웨이퍼 (Bare Wafer)
박막증착 웨이퍼
박막증착 웨이퍼
| nket Wafer |
Thin Film Type |
Thin Film |
Method |
| Oxide |
Th-SiO2 |
Dry, Wet |
| Low-Particle Th-SiO2 |
Dry, Wet |
| PE-SiO2 |
PE-CVD |
| PE-TEOS |
PE-CVD |
| LP-CVD TEOS |
LP-CVD |
| HDP |
PE-CVD |
| USG |
PE-CVD |
| PSG |
CVD |
| BPSG |
CVD |
| RTO |
Anneal |
| Poly Silicon |
Doped / non Doped |
LP-CVD |
| Amorphous |
|
| Nitride |
LP-CVD SIN |
LP-CVD |
| PE-CVD SIN |
PE-CVD |
| P-SiON |
CVD |
| Photo Resists |
I-Line |
Spin Coater |
| KrF |
Spin Coater |
| ArF |
Spin Coater |
| Low-K |
BD |
CVD |
| BDⅡX |
CVD |
| BDⅢ |
CVD |
| AURORA |
CVD |
| CORAL |
CVD |
| Metal |
Ta , TaN |
Sputter |
| Ti , TiN |
Sputter |
| W |
Sputter , CVD |
| Cr |
Sputter |
| Cu |
Sputter |
| Al , Al-Cu , Al-Si |
Sputter |
| Pt |
Sputter |
| Ni |
Sputter |
| Ru |
Sputter |
| Pd |
Sputter |
| Au |
Sputter |
| Co |
Sputter |
| etc |
Sputter |
